Themamiddag: Tribology in Semiconductor Manufacturing
Semiconductor manufacturing equipment uses machine parts that are being manufactured in series against nanometer specifications. During the use in mass production at continuous operation and ever increasing throughput rates this accuracy needs to be maintained. The usage puts challenging demands on lifetime performance as well as on contamination due to wear and particle generation.
Tribological components such as bearings and guides are used under conditions beyond the limits set by suppliers: making small oscillating movements or step-scan motions under high accelerations. Vacuum environments prevent the use of conventional greases.
Planned restrictions of PFAS containing materials demand the replacement of PTFE, ‘Teflon’, and PFPE, the main base oil in vacuum grade lubricants.
On 5 June 2024 the Tribology section of the Bond voor Materialenkennis organizes a theme event around this subject which will be hosted by ASML including a visit to the ASML Experience Center.